Damage of Cr film by oxygen plasma - ScienceDirect
Schematic of the surface reaction mechanism for SiO 2 etching by a... | Download Scientific Diagram
PDF] Remote plasma etching of silicon nitride and silicon dioxide using NF3/ O2 gas mixtures | Semantic Scholar
Possible treatment mechanism of etched MoS 2 using a H 2 S plasma after... | Download Scientific Diagram
Plasma Etching - an overview | ScienceDirect Topics
Fabrication of polymer nanowires via maskless O2 plasma etching - IOPscience
SF6 Optimized O2 Plasma Etching of Parylene C
Plasma Etching - an overview | ScienceDirect Topics
1. Introduction
Plasma etching of polydimethylsiloxane: Effects from process gas composition and dc self-bias voltage: Journal of Vacuum Science & Technology B: Vol 29, No 1
Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide: Journal of Vacuum Science & Technology A: Vol 31, No 2
Single-step plasma-induced hierarchical structures for tunable water adhesion | Scientific Reports
Chapter 10 Etching Introduction to etching. - ppt video online download
Dry Etching - an overview | ScienceDirect Topics
Plasma-Based Nanostructuring of Polymers: A Review
Interfacial Contact is Required for Metal‐Assisted Plasma Etching of Silicon - Sun - 2018 - Advanced Materials Interfaces - Wiley Online Library
Development and characterization of plasma etching processes for the dimensional control and LWR issues during High-k Metal gate
Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication - Nanoscale (RSC Publishing) DOI:10.1039/C8NR06502K